Can a Procedure for the Growth of Single‐layer Graphene on Copper be used in Different Chemical Vapor Deposition Reactors?
نویسندگان
چکیده
In the last decade, catalytic chemical vapor deposition (CVD) has been intensively explored for growth of single-layer graphene (SLG). Despite scattering guidelines and procedures, variables such as surface texture/chemistry catalyst metal foils, carbon feedstock, process parameters have well-scrutinized. Still, questions remain on how best to standardize procedure. The possible correlation procedures between different CVD setups is an example. Here, two thermal reactors were grow Cu foil. design these was entirely distinct, one being a “showerhead” cold-wall type, whereas other represented popular “tubular” hot-wall type. Upon standardizing foil surface, it develop procedure cm2-scale SLG that differed only by carrier gas flow rate used in reactors.
منابع مشابه
Synthetic graphene grown by chemical vapor deposition on copper foils
TING FUNG CHUNG∗,‡, TIAN SHEN∗, HELIN CAO∗,‡, LUIS A. JAUREGUI†,‡, WEI WU§, QINGKAI YU¶, DAVID NEWELL‖ and YONG P. CHEN∗,†,‡,∗∗ ∗Department of Physics, West Lafayette, Indiana 47907, USA †School of Electrical and Computer Engineering, West Lafayette, Indiana 47907, USA ‡Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA §Department of Electrical and Computer Engi...
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ژورنال
عنوان ژورنال: Chemistry-an Asian Journal
سال: 2021
ISSN: ['1861-471X', '1861-4728']
DOI: https://doi.org/10.1002/asia.202100199